The 6520 Programmable Teraohmmeter makes resistance measurements up to 10 PΩ. Whether used in automated mode via the Guildline developed TeraCal Software or as a stand-alone meter, the 6520 provides a fully automated method for calibrating both high and ultra-high resistance values and allows for direct Surface and Volume measurements.


  • Resistance Range 100 kΩ to Over 10 PΩ and Current Range 10 mA to 100 fA
  • Built-In Voltage Source From 1 V to 1000 V
  • Automatic Sensing of Resistance Range, Integration Time and Threshold Voltage
  • Surface and Volume Resistivity Measurements With 65221 Test Fixture
  • Environmental Monitoring With 65220 Sensors
  • Logging, Graphical Display and Analysis of Measurements
  • TeraCal™ Data Acquisition Software and Optional 6564 Scanner Automates Operation
  • SCPI Compliant IEEE-488.2 and RS232C Built-In